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不足膨張噴流VHFプラズマを用いたダイヤモンドライクカーボン膜の超高速成膜
https://kindai.repo.nii.ac.jp/records/2003387
https://kindai.repo.nii.ac.jp/records/200338763e87369-7ad7-4334-940b-0c0cd2634bbe
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
AA12013209-20250731-0037.pdf (1.4 MB)
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| アイテムタイプ | 紀要論文 / departmental bulletin paper(1) | |||||||||
|---|---|---|---|---|---|---|---|---|---|---|
| 公開日 | 2025-09-05 | |||||||||
| タイトル | ||||||||||
| タイトル | 不足膨張噴流VHFプラズマを用いたダイヤモンドライクカーボン膜の超高速成膜 | |||||||||
| 言語 | ja | |||||||||
| タイトル | ||||||||||
| タイトル | Ultrafast deposition of diamond-like carbon films by the VHF plasma with underexpanded jet | |||||||||
| 言語 | en | |||||||||
| 作成者 |
牟田, 浩司
× 牟田, 浩司
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| 言語 | ||||||||||
| 言語 | jpn | |||||||||
| キーワード | ||||||||||
| 主題 | Underexpanded jet, VHF plasma, DLC films, Ultrafast film deposition | |||||||||
| 内容記述 | ||||||||||
| 内容記述タイプ | Other | |||||||||
| 内容記述 | 論文 | |||||||||
| 言語 | ja | |||||||||
| 内容記述 | ||||||||||
| 内容記述タイプ | Abstract | |||||||||
| 内容記述 | Diamond-like carbon (DLC) films are widely used in surface coating for machine parts, inner surface of container, medical equipment due to many excellent features, such as high hardness, low friction coefficient, chemical stability and biocompatibility. In these manufacturing fields, one of the most required characteristics is the higher deposition rate which leads to the cost reduction. In order to realize the ultrafast deposition, we have developed a new plasma-enhanced chemical vapor deposition (PECVD) method using an underexpanded impinging jet. Using this method, we have successfully achieved the deposition rate more than 1000 times faster than conventional methods although it is limited to local area. Simultaneously, a unique pattern was observed in the film thickness distribution according to the experimental conditions. To improve the film uniformity, we applied the triode method which is used in thin-film silicon solar cell manufacturing. As a result, it was found that the triode method is effective for uniformity of the DLC films. | |||||||||
| 言語 | en | |||||||||
| 出版者 | ||||||||||
| 出版者 | 近畿大学産業理工学部 | |||||||||
| 言語 | ja | |||||||||
| 資源タイプ | ||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||
| 資源タイプ | departmental bulletin paper | |||||||||
| 出版タイプ | ||||||||||
| 出版タイプ | AM | |||||||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||||||
| 収録物識別子 | ||||||||||
| 収録物識別子タイプ | EISSN | |||||||||
| 収録物識別子 | 13495801 | |||||||||
| 書誌情報 |
ja : かやのもり：近畿大学産業理工学部研究報告 en : Reports of Faculty of Humanity-Oriented Science and Engineering, Kindai University 号 36, p. 37-41, 発行日 2025-07-31 |
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