{"created":"2023-06-20T16:47:10.451787+00:00","id":18806,"links":{},"metadata":{"_buckets":{"deposit":"2316bbcd-11e1-4358-b1f8-6508bea69853"},"_deposit":{"created_by":3,"id":"18806","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"18806"},"status":"published"},"_oai":{"id":"oai:kindai.repo.nii.ac.jp:00018806","sets":["14:2667:4374"]},"author_link":["31786","31785"],"item_8_biblio_info_21":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2017","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"6","bibliographicPageStart":"1","bibliographic_titles":[{"bibliographic_title":"科学研究費助成事業研究成果報告書 (2016)"}]}]},"item_8_description_33":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"研究成果の概要（和文）：環境セル型透過電子顕微鏡に用いる高強度隔膜としてa-SiCN隔膜に着目し、その作製手法として磁場・パルスプラズマ援用化学気相成長法（MPECVD）を開発した。a-SiCN隔膜作製のための原料ガスとして、大気中で安定なヘキサメチルジシラザンと窒素およびアルゴンを用いて作製した。磁場を印加することにより、通常のプラズマCVDに比べて成膜速度の向上がみられた。様々な条件により隔膜はCuグリッドの穴を覆うように作製し、その評価を赤外分光法、光電子分光法および透過電子顕微鏡などで評価した。その結果、パルス電圧を上げ、窒素の流量を上げ、さらに反応容器内の圧力を下げることで高強度を示す隔膜の開発に成功した。\n研究成果の概要（英文）：A magnetic-field and pulsed-plasma-enhanced chemical vapor deposition (MPECVD) was developed to fabricate amorphous silicon carbonitride (a-SiCN) diaphragm for environmental-cell transmission electron microscope (E-TEM). The films were prepared by using gaseous hexamethyldisilazane (HMDSN), N2 and Ar. The deposition rate was increased by enhancement of magnetic-field in comparison with a conventional PECVD. The diaphragms were applied to a Cu grid with 100-um-diameter holes. Fourier transform infrared spectra and X-ray photoelectron spectra revealed that an elimination of organic compounds and a formation of Si-N and C-N bonds in diaphragms can be promoted with increasing pulse voltage and N2 flow rate and decreasing ambient pressure. The diaphragms were amorphous and transparent at 200 kV electrons and no chargeup was observed by E-TEM. Durability to electron beams and reaction gases in the E-cell was improved when diaphragm was deposited with high pulse voltage.","subitem_description_type":"Abstract"}]},"item_8_description_36":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"研究種目：基盤研究(C);  研究期間：2014～2016;   課題番号：26420685;   研究分野：荷電粒子ビーム応用;   科研費の分科・細目：","subitem_description_type":"Other"}]},"item_8_description_37":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"Research Paper","subitem_description_type":"Other"}]},"item_8_description_41":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_8_publisher_14":{"attribute_name":"出版者 名前","attribute_value_mlt":[{"subitem_publisher":"近畿大学"}]},"item_8_relation_11":{"attribute_name":"著者 外部リンク","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-26420685/"}]}]},"item_8_text_10":{"attribute_name":"著者 役割","attribute_value_mlt":[{"subitem_text_value":"研究代表者/連携研究者"}]},"item_8_text_7":{"attribute_name":"著者(英)","attribute_value_mlt":[{"subitem_text_language":"en","subitem_text_value":"MATSUTANI, Takaomi"},{"subitem_text_language":"en","subitem_text_value":"KAWASAKI, Tadahiro"}]},"item_8_text_8":{"attribute_name":"著者 所属","attribute_value_mlt":[{"subitem_text_value":"近畿大学理工学部; 准教授"},{"subitem_text_value":"ファインセラミックスセンター; 主任研究員"}]},"item_8_text_9":{"attribute_name":"著者所属(翻訳)","attribute_value_mlt":[{"subitem_text_value":"Kindai University"}]},"item_8_version_type_12":{"attribute_name":"版","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_be7fb7dd8ff6fe43","subitem_version_type":"NA"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"松谷, 貴臣"},{"creatorName":"マツタニ, タカオミ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"31785","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"00411413","nameIdentifierScheme":"研究者番号","nameIdentifierURI":" "}]},{"creatorNames":[{"creatorName":"川﨑, 忠寛"},{"creatorName":"カワサキ, タダヒロ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"31786","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"10372533","nameIdentifierScheme":"研究者番号","nameIdentifierURI":" "}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-11-01"}],"displaytype":"detail","filename":"26420685seika.pdf","filesize":[{"value":"2.0 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"26420685seika.pdf","url":"https://kindai.repo.nii.ac.jp/record/18806/files/26420685seika.pdf"},"version_id":"d363a521-df96-4f4a-b6be-a462caeeb4c3"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"環境セル","subitem_subject_scheme":"Other"},{"subitem_subject":"隔膜","subitem_subject_scheme":"Other"},{"subitem_subject":"磁場","subitem_subject_scheme":"Other"},{"subitem_subject":"パルスプラズマ","subitem_subject_scheme":"Other"},{"subitem_subject":"化学気相成長法","subitem_subject_scheme":"Other"},{"subitem_subject":"窒化物薄膜","subitem_subject_scheme":"Other"},{"subitem_subject":"アモルファス","subitem_subject_scheme":"Other"},{"subitem_subject":"雰囲気内顕微","subitem_subject_scheme":"Other"},{"subitem_subject":"鏡観察","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"research report","resourceuri":"http://purl.org/coar/resource_type/c_18ws"}]},"item_title":"磁場・パルスプラズマ援用化学気相成長法による環境セル型透過電子顕微鏡用隔膜の開発","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"磁場・パルスプラズマ援用化学気相成長法による環境セル型透過電子顕微鏡用隔膜の開発"},{"subitem_title":"Development of magnetic-field and pulsed-plasma-enhanced chemical vapor deposition method to fabricate amorphous silicon carbonitride diaphragm for environmental-cell transmission electron microscope","subitem_title_language":"en"}]},"item_type_id":"8","owner":"3","path":["4374"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-11-01"},"publish_date":"2017-11-01","publish_status":"0","recid":"18806","relation_version_is_last":true,"title":["磁場・パルスプラズマ援用化学気相成長法による環境セル型透過電子顕微鏡用隔膜の開発"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-06-20T21:49:19.413359+00:00"}