{"created":"2023-06-20T16:46:38.828011+00:00","id":18158,"links":{},"metadata":{"_buckets":{"deposit":"773fb0db-0f0f-4950-8eae-61b1b36e30a0"},"_deposit":{"created_by":29,"id":"18158","owners":[29],"pid":{"revision_id":0,"type":"depid","value":"18158"},"status":"published"},"_oai":{"id":"oai:kindai.repo.nii.ac.jp:00018158","sets":["14:2667:4296"]},"author_link":["30588"],"item_8_biblio_info_21":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2016","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"5","bibliographicPageStart":"1","bibliographic_titles":[{"bibliographic_title":"科学研究費助成事業研究成果報告書 (2015)"}]}]},"item_8_description_33":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"研究成果の概要（和文）：本研究は微結晶シリコン製膜プロセスの高速化・高品質化・大面積化を目指して、特にガス流れに注目し、プラズマや膜特性との関係を詳細に調べ、製膜プロセスの高度化を図ることを目的としている。シランプラズマ中で超音速噴流を用いると、ガス圧とノズル基板間距離を最適化することで従来の約1000倍以上の製膜速度が得られるが、同時に気相中に発生するクラスターが膜質を劣化させる。これに対し、マルチロッドとマルチホローを組み合わせた電極を用いることで、高品質な膜を高速かつ大面積に得られる見通しを得た。\n研究成果の概要（英文）：In this study, high speed fabrication of large-area microcrystalline silicon films using VHF plasma with an under-expanded supersonic jet is presented. Especially we focused on the gas flow which is the key to realize approximately 1000 times higher deposition rate than conventional one. From the detailed research of the jet flow, it was found that both the gas pressure and distance between the gas nozzle and substrate are important for the high speed deposition. Then, the great amount of clusters can be generated in the gas phase and transport into the film on the substrate, sometimes the positive charged clusters cause ion bombardment. Therefore, we proposed a new electrode system which efficiently remove the clusters and proved the validity for the film quality.","subitem_description_type":"Abstract"}]},"item_8_description_36":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"研究種目：基盤研究(C);  研究期間：2013～2015;   課題番号：25390108;   研究分野：応用物理学;   科研費の分科・細目：","subitem_description_type":"Other"}]},"item_8_description_37":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"Research Paper","subitem_description_type":"Other"}]},"item_8_description_41":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_8_publisher_14":{"attribute_name":"出版者 名前","attribute_value_mlt":[{"subitem_publisher":"近畿大学"}]},"item_8_relation_11":{"attribute_name":"著者 外部リンク","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-25390108/"}]}]},"item_8_text_10":{"attribute_name":"著者 役割","attribute_value_mlt":[{"subitem_text_value":"研究代表者"}]},"item_8_text_7":{"attribute_name":"著者(英)","attribute_value_mlt":[{"subitem_text_language":"en","subitem_text_value":"MUTA, Hiroshi"}]},"item_8_text_8":{"attribute_name":"著者 所属","attribute_value_mlt":[{"subitem_text_value":"近畿大学工学部; 教授"}]},"item_8_text_9":{"attribute_name":"著者所属(翻訳)","attribute_value_mlt":[{"subitem_text_value":"Kindai University"}]},"item_8_version_type_12":{"attribute_name":"版","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_be7fb7dd8ff6fe43","subitem_version_type":"NA"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"牟田, 浩司"},{"creatorName":"ムタ, ヒロシ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"30588","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"10219850","nameIdentifierScheme":"研究者番号","nameIdentifierURI":" "}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2016-10-15"}],"displaytype":"detail","filename":"25390108seika.pdf","filesize":[{"value":"437.2 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"25390108seika.pdf","url":"https://kindai.repo.nii.ac.jp/record/18158/files/25390108seika.pdf"},"version_id":"04636e7f-c7f0-4705-a4d8-f0ae2f9d7bd4"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"VHFプラズマ","subitem_subject_scheme":"Other"},{"subitem_subject":"超音速噴流","subitem_subject_scheme":"Other"},{"subitem_subject":"高速製膜","subitem_subject_scheme":"Other"},{"subitem_subject":"クラスター","subitem_subject_scheme":"Other"},{"subitem_subject":"マルチホローカソード","subitem_subject_scheme":"Other"},{"subitem_subject":"シランプラズマ","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"research report","resourceuri":"http://purl.org/coar/resource_type/c_18ws"}]},"item_title":"超音速噴流を用いたＶＨＦプラズマによる高速大面積微結晶シリコン製膜法の開発","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"超音速噴流を用いたＶＨＦプラズマによる高速大面積微結晶シリコン製膜法の開発"},{"subitem_title":"High speed fabrication of large-area microcrystalline silicon films using VHF plasma with an under-expanded supersonic jet","subitem_title_language":"en"}]},"item_type_id":"8","owner":"29","path":["4296"],"pubdate":{"attribute_name":"公開日","attribute_value":"2016-10-15"},"publish_date":"2016-10-15","publish_status":"0","recid":"18158","relation_version_is_last":true,"title":["超音速噴流を用いたＶＨＦプラズマによる高速大面積微結晶シリコン製膜法の開発"],"weko_creator_id":"29","weko_shared_id":-1},"updated":"2023-06-20T22:07:05.559764+00:00"}